/ Home
/ SUBMISSION

/ The BJNANO
/ Diamond Open Access
/ Journal Statistics
/ Editorial Board
/ Community
/ Call for papers

/ Latest Articles
/ Most accessed
/ Thematic issues
/ Volumes
/ Authors

/ Alerts

/ TWITTER
/ LINKEDIN
/ Mastodon
/ RSS FEED

Empty search

Article Type

Publication Date Range

Search Tips

This search combines search strings from the content search (i.e. "Full Text", "Author", "Title", "Abstract", or "Keywords") with "Article Type" and "Publication Date Range" using the AND operator.

Search Examples

aromatic	the word “aromatic”
aromatic aldehyde	the word “aromatic” OR “aldehyde”
+aromatic +aldehyde	both words “aromatic” AND “aldehyde”
+aromatic -aldehyde	the word “aromatic” but NOT “aldehyde”
“aromatic aldehyde”	the exact phrase “aromatic aldehyde”
benz*	words which begin with “benz”, such as “benzene” or “benzyl”
benz*yl	words that begin with “benz” and end with “yl”, such as “benzyl” or “benzoyl”
benzyl~	words that are close to the word “benzyl”, such as “benzoyl” (i.e., fuzzy search)

BROWSE
Latest Articles
Most accessed
thematic issues
volumes
authors

BROWSE

Latest Articles Most Accessed Thematic Issues Volumes Authors

Author

1 article(s) from Junghans, Romy

Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir

Mathias Franz,
Romy Junghans,
Paul Schmitt,
Adriana Szeghalmi and
Stefan E. Schulz

Beilstein J. Nanotechnol. 2020, 11, 1439–1449, doi:10.3762/bjnano.11.128

PDF

Figure 1: Fabricated noble metal particles. (a–e): SEM images of wafer surface; (f–j): particle size distribu...

Jump to Figure 1

Figure 2: SEM surface images after 90 cycles of Ir ALD. The inset shows the corresponding cross section.

Jump to Figure 2

Figure 3: Microscope image of etched structures.

Jump to Figure 3

Figure 4: SEM images of etched structures (with 50 mmol/L H₂O₂ and 1.73 mol/L HF for 10 min) using Au particl...

Jump to Figure 4

Figure 5: SEM images of etched structures (with 145 mmol/L H₂O₂ and 1.73 mol/L HF for 10 min) using Au partic...

Jump to Figure 5

Figure 6: Measured reflectance of Au wafers after 10 min of etching in HF (1.73 mol/L)/H₂O₂ solution.

Jump to Figure 6

Figure 7: SEM images of etched structures (with 50 mmol/L H₂O₂ and 1.73 mol/L HF for 10 min) using Pd particl...

Jump to Figure 7

Figure 8: SEM images of etched structures using Cu particles, etched for 10 min with 1.73 mol/L HF and 10 mmo...

Jump to Figure 8

Figure 9: SEM images of etched structures (with 100 mmol/L H₂O₂ and 1.73 mol/L HF for 10 min) using Ir partic...

Jump to Figure 9

Figure 10: Reflectance of fabricated 3D templates, etched with 50 mmol/L H₂O₂ and 1.73 mol/L HF for 10 min. Ad...

Jump to Figure 10

Album

Full Research Paper

Published 23 Sep 2020

Full text

Other Beilstein-Institut Open Science Activities

/ Help / Support & Contact / Alerts / Privacy Policy / Terms & Conditions / Impressum